Two-Stage Chemical Deposition of Oxide Films


1 Materials Science and Engineering, Sharif University of Technology

2 Nanotechnology and Advanced Materials Department, Material and Energy Research Center(MERC)


Two-stage chemical deposition (TSCD) technique is used to produce ZnO, Mn2O3 and NiO films on soda-lime glass (SL-G) from an aqueous solution of zinc, manganese and nickel complex, respectively. The TSCD method enables the deposition of metal oxide thin films with a thickness which can be controlled during the preparation procedure. The ZnO, Mn2O3 and NiO thin films were polycrystalline films which were adherent well to the substrates. The SEM micrographs clearly indicate that the zinc oxide layer is composed of oval shaped crystallites preferably orientated perpendicular to the surface of the substrate. The Mn2O3 and NiO layers were closely packed on the substrate. These particles seem to grow from the surface of the substrate.