1
Electerical Engineering, Markazi province.Unit.ACECR
2
Electrical Engineering, Babol University of Technology
Abstract
In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh's method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate the effect of residual stress, Young modulus and corrugation numbers on resonance frequency of diaphragm. In this work, MATLAB software for analytical analyzes and Intellisuite MEMS tool for finite element simulation have been used. The analytical and simulated results have been compared together and there is good agreement between them.
taybi, M., & azizollah Ganji, B. (2014). Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE). International Journal of Engineering, 27(12), 1850-1854.
MLA
mehdi taybi; bahram azizollah Ganji. "Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE)". International Journal of Engineering, 27, 12, 2014, 1850-1854.
HARVARD
taybi, M., azizollah Ganji, B. (2014). 'Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE)', International Journal of Engineering, 27(12), pp. 1850-1854.
VANCOUVER
taybi, M., azizollah Ganji, B. Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE). International Journal of Engineering, 2014; 27(12): 1850-1854.
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