Electrical Engineering, Babol University of Technology
Abstract
In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can be seen that the analytical results are very agreement with simulation. The results also show that the high sensitivity can be achieaved by decreasing the diaphragm thickness and increasing the diaphragm size.
Shams Nateri, M., & azizollah Ganji, B. (2013). Modeling of capacitance and sensitivity of a MEMS pressure sensor. International Journal of Engineering, 26(11), 1331-1336.
MLA
Mojtaba Shams Nateri; bahram azizollah Ganji. "Modeling of capacitance and sensitivity of a MEMS pressure sensor". International Journal of Engineering, 26, 11, 2013, 1331-1336.
HARVARD
Shams Nateri, M., azizollah Ganji, B. (2013). 'Modeling of capacitance and sensitivity of a MEMS pressure sensor', International Journal of Engineering, 26(11), pp. 1331-1336.
VANCOUVER
Shams Nateri, M., azizollah Ganji, B. Modeling of capacitance and sensitivity of a MEMS pressure sensor. International Journal of Engineering, 2013; 26(11): 1331-1336.