Electrical Engineering, Babol University of Technology
Abstract
external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is 45 mV, and the maximum output of MEMS microphone is 1.125 µV.
azizollah Ganji, B. (2010). Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm. International Journal of Engineering, 23(3), 191-200.
MLA
bahram azizollah Ganji. "Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm". International Journal of Engineering, 23, 3, 2010, 191-200.
HARVARD
azizollah Ganji, B. (2010). 'Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm', International Journal of Engineering, 23(3), pp. 191-200.
VANCOUVER
azizollah Ganji, B. Fabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm. International Journal of Engineering, 2010; 23(3): 191-200.
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