TY - JOUR ID - 73074 TI - The Effect of Material Properties on Sensitivity of the Microelectromechanical Systems Piezoelectric Hydrophone JO - International Journal of Engineering JA - IJE LA - en SN - 1025-2495 AU - Shams Nateri, M. AU - Azizollah Ganji, B. AD - Department of Electrical & Computer Engineering, Babol University of Technology, Babol, Iran Y1 - 2017 PY - 2017 VL - 30 IS - 12 SP - 1848 EP - 1855 KW - Piezoelectric KW - hydrophone KW - Stress KW - Strain KW - Sound DO - N2 - In this paper, we present mathematical analyses to consider the effect of material properties on the sensitivity of the Microelectromechanical systems (MEMS) piezoelectric hydrophone and improve the sensitivity by choosing the proper material. The selected structure in the present paper is a piezoelectric hydrophone able to work at low frequencies. The piezoelectric hydrophones are widely used in sonar structure. Sonar systems are used in marine vessels and transportation, military submarines, battleships, etc. Piezoelectric hydrophones work by converting the received sound pressure to electrical signals. This conversion of sonar energy to electrical energy is performed by the piezoelectric material in the structure of the hydrophone. Thus, the applied piezoelectric material has significant effect on sensitivity and performance of the sensor. In this paper, the sensitivity of the sensor has been improved from -201.3 dB to -192.6 dB by choosing the proper material with higher piezoelectric coefficients (PZT-2 instead of PZT-5A). UR - https://www.ije.ir/article_73074.html L1 - https://www.ije.ir/article_73074_726b9cca44994c53d26d8cef3770ad60.pdf ER -