TY - JOUR ID - 72202 TI - The Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEMS Capacitive Microphone JO - International Journal of Engineering JA - IJE LA - en SN - 1025-2495 AU - azizollah Ganji, bahram AU - Taybi, Mehdi AD - Electrical Engineering, Babol University of Technology AD - Electrical & Computer Engineering, Babol University of Technology Y1 - 2013 PY - 2013 VL - 26 IS - 11 SP - 1323 EP - 1330 KW - Corrugation diaphragm KW - Residual Stress KW - Mechanical stress KW - mechanical sensitivity DO - N2 - In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that the mechanical sensitivity and displacement of diaphragm can be modeled using thin plate theory. The mechanical stress of corrugated diaphragm is calculated using mathematical model and its relationship to residual stress is expressed. The analytically result show that the mechanical sensitivity of diaphragm can be increased using corrugation. Because the corrugation can be reduce the effect of residual stress of diaphragm. UR - https://www.ije.ir/article_72202.html L1 - https://www.ije.ir/article_72202_b36ce4732e9ff9d180b452f44af27887.pdf ER -