TY - JOUR ID - 72097 TI - Analytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm (RESEARCH NOTE) JO - International Journal of Engineering JA - IJE LA - en SN - 1025-2495 AU - shahiri, mannaneh AU - azizollah Ganji, bahram AD - Department of Electrical Engineering, Islamic Azad University AD - Electrical Engineering, Babol University of Technology Y1 - 2013 PY - 2013 VL - 26 IS - 3 SP - 297 EP - 302 KW - Capacitance KW - Deflection KW - Capacitive pressure sensor KW - Diaphragm deflection DO - N2 - Abstract   In this paper analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated by use of finite element analysis. The central deflection and capacitance values under uniform external pressure are calculated. Comparison of theoretical results shows good agreement with finite element analysis. The results indicate that the mathematical model has a high accuracy to determine the sensor behaviors. UR - https://www.ije.ir/article_72097.html L1 - https://www.ije.ir/article_72097_2c12d1c82bea91744407abfe90814401.pdf ER -