@article { author = {Ahmadnejad, Javad and azizollah Ganji, bahram}, title = {A MEMS Capacitive Microphone Modelling for Integrated Circuits}, journal = {International Journal of Engineering}, volume = {28}, number = {6}, pages = {888-895}, year = {2015}, publisher = {Materials and Energy Research Center}, issn = {1025-2495}, eissn = {1735-9244}, doi = {}, abstract = {In this paper, a model for MEMS capacitive microphone is presented for integrated circuits.  The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no pressure on the diaphragm. The microphone also has a capacitance of 2.3 pF. Using the relation between the capacitance and pressure signal, a 3 ports model for the MEMS microphone is proposed. To bias the microphone, a 2.3 V DC and a 1 GΩ resistor is used. The voltage and current signal of the microphone is proportional to the applied pressure of the acoustic wave. A RC filter is added to circuit to eliminate the low band frequency (≤ 20 Hz) noises. The microphone shows good response to amplitude and frequency changes versus applied pressure signal.}, keywords = {MEMS,Modeling,capacitive microphone,integrated circuits}, url = {https://www.ije.ir/article_72529.html}, eprint = {https://www.ije.ir/article_72529_43a1e0d4f1c2e6cc6d2b7a3781c68205.pdf} }