Keywords = Capacitance
Accurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress

Volume 27, Issue 1, January 2014, Pages 63-68

Mehdi Taybi; bahram azizollah Ganji

Modeling of capacitance and sensitivity of a MEMS pressure sensor

Volume 26, Issue 11, November 2013, Pages 1331-1336

Mojtaba Shams Nateri; bahram azizollah Ganji

Analytical Analysis of Capacitive Pressure Sensor with Clamped Diaphragm (RESEARCH NOTE)

Volume 26, Issue 3, March 2013, Pages 297-302

mannaneh shahiri; bahram azizollah Ganji