Quality Factor of Free In-plane Vibration of a Fully Clamped Rectangular Micro-plate

Authors

1 Mechanical Engineering Department, Urmia University, Urmia, Iran

2 Electrical Engineering Department, Urmia University, Urmia, Iran

Abstract

Thermo-elastic damping is a significant dissipation mechanism in high quality factor microstructures. In this paper, thermo-elastic damping of the in-plane vibration of fully clamped rectangular micro-plates has been studied. The governing equation of the micro-plate motion and heat conduction equation were derived. Then, The Galerkin method has been used to solve the coupled heat-displacement equations. Eventually, considering the micro-plate of various materials, the effects of geometrical parameters including the length and width of micro-plate and also ambient temperature on the thermo-elastic damping quality factor have been investigated.

Keywords

References

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International Journal of Engineering
Volume 31, Issue 1
TRANSACTIONS A: Basics
January 2018
Pages 96-103

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