1
Mechanical Engineering, Sharif University of Technology
2
mechanical engineering, Urmia university
3
Mechanical Engineering, Sharif University of Tech
Abstract
In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended Kalman filter (EKF) algorithm. A tracking control system is designed to make a specific point of the beam follow a reference signal. The effect of mode selection to include in model on controller performance is also investigated. Based on the tracking controller a shape control algorithm is designed to form the shape of beam into a desired shape. The proposed algorithms are validated by numerical simulation and resulted in a promising performance.
Salarieh, H., shabani, R., & Karami, F. (2014). Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation. International Journal of Engineering, 27(9), 1439-1448.
MLA
H. Salarieh; rasoul shabani; Farzad Karami. "Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation". International Journal of Engineering, 27, 9, 2014, 1439-1448.
HARVARD
Salarieh, H., shabani, R., Karami, F. (2014). 'Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation', International Journal of Engineering, 27(9), pp. 1439-1448.
VANCOUVER
Salarieh, H., shabani, R., Karami, F. Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation. International Journal of Engineering, 2014; 27(9): 1439-1448.