Abstract




 
   

IJE TRANSACTIONS C: Aspects Vol. 28, No. 12 (December 2015) 1790-1795   

PDF URL: http://www.ije.ir/Vol28/No12/C/12-2146.pdf  
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  AN INVESTIGATION ON TWO TYPES OF CRYSTALLINE MICRO-DIAMOND FILM COATED TOOLS LAPPING WITH SAPPHIRE WAFER
 
F. Wei, L. Wenzhuang and Z. Dunwen
 
( Received: August 07, 2015 – Accepted: December 24, 2015 )
 
 

Abstract    Two types of micron-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition(HFCVD) method. Morphology and orientation of crystalline growth were evaluated by SEM and XRD. Diamond film coated tools and sapphire wafer’ surface before and after lapping experiment were contrasted. The results indicated that a significant change in Raman spectrum of two types of micron-diamond film appeared after lapping. The two types of micron- diamond film’s graphitization were all obviously. The SMDF tool’s value of friction coefficient was larger than the FMDF’s. The surface roughness of sapphire wafer lapped by FMDF was lower than by SMDF. Compared two kinds of micron diamond film, FMCD's lapping effect was better.

 

Keywords    micron-diamond film , lapping, sapphire wafer

 

چکیده    دو نوع فیلم میکرون-الماس بر روی سوبسترای YG6 با روش رسوب شیمیایی بخار رشته داغ (HFCVD) ساخته شد. مورفولوژی و جهت رشد کریستالی توسط میکروسکوپ الکترونی روبشی (SEM) و پراش اشعه (XRD) X مورد بررسی قرار گرفت. سطح الماس ابزارهای روکش دار شده با الماس و ویفر یاقوت قبل و بعد از تا خوردگی مقایسه شدند. طیف رامان از دو فیلم میکرون-الماس نشان داد که تغییر قابل توجهی در خواص سطحی پس از تا خوردن رخ داده است. این تغییر به گرافیتی شدن سطح الماس مربوط می شود. ضریب اصطکاک ZMDF بزرگتر از ابزار FMDFبود. زبری سطح ویفر یاقوت تا خورده توسط FMDF (بافت <110> )کمتر از (<111>) ZMDF بود. با مقایسه دو نوع فیلم الماس-میکرون معلوم شد که اثر تا خوردگی ابزار FMCD بهتر بود.

References   

 

1.     Zhu, H., Tessaroto, L.A., Sabia, R., Greenhut, V.A., Smith, M. and Niesz, D.E., "Chemical mechanical polishing (CMP) anisotropy in sapphire", Applied Surface Science,  Vol. 236, No. 1, (2004), 120-130.

2.     Park, H. and Chan, H.M., "A novel process for the generation of pristine sapphire surfaces", Thin Solid Films,  Vol. 422, No. 1, (2002), 135-140.

3.     Liang, Z., Wang, X., Wu, Y., Xie, L., Liu, Z. and Zhao, W., "An investigation on wear mechanism of resin-bonded diamond wheel in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire", Journal of Materials Processing Technology,  Vol. 212, No. 4, (2012), 868-876.

4.     Vaezi, M. and Zameni, M., "Synthesis of zinc oxide nanostructured thin film by sol-gel method and evaluation of gas sensing properties", International Journal of Engineering-Transactions B: Applications,  Vol. 27, No. 5, (2013), 757.

5.     Tomé, M., Fernandes, A., Oliveira, F., Silva, R. and Carrapichano, J., "High performance sealing with cvd diamond self-mated rings", Diamond and Related Materials,  Vol. 14, No. 3, (2005), 617-621.

6.     Kamiya, S., Takahashi, H., Polini, R. and Traversa, E., "Quantitative determination of the adhesive fracture toughness of cvd diamond to wc–co cemented carbide", Diamond and Related Materials,  Vol. 9, No. 2, (2000), 191-194.

7.     Sha, L., "Study on the substrate surface pretreatment at cemented carbides and diamond  coatings", Central South University,  Vol., No., (2003).

8.     Long, F., Wei, Q., Yu, Z., Luo, J., Zhang, X., Long, H. and Wu, X., "Effects of temperature and mo 2 c layer on stress and structural properties in cvd diamond film grown on mo foil", Journal of Alloys and Compounds,  Vol. 579, No., (2013), 638-645.

9.     Guowei, Y. and L. Jing and "A kinetic model for the growth of diamond films by chemical", Journal of Synthetic Crystals,  Vol. 82, No. 12, (1997), 6293-6300.

10.   Xianming, M., W. Fengying, H. Lifu, , "Effects of deposition parameters on cvd nanocrystalline diamond thin films", Materials Science and Technology,  Vol. 3, No., (2009), 393-396.

11.   Shen, B. and Sun, F., "Effect of surface morphology on the frictional behaviour of hot filament chemical vapour deposition diamond films", Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology,  Vol. 223, No. 7, (2009), 1049-1058.

12.   Wang, T., Jiang, X., Biermanns, A., Bornemann, R. and Bolívar, P.H., "Deposition of diamond/β-sic composite gradient films by hfcvd: A competitive growth process", Diamond and related materials,  Vol. 42, No., (2014), 41-48.

13.   Field, J.E., "The properties of diamond, Academic Press,  (1979).

14.   Zhou, L., Huang, S., Wang, X. and Xu, L., "High-speed mechanical lapping of cvd diamond films using diamond wheel", International Journal of Refractory Metals and Hard Materials,  Vol. 35, No., (2012), 185-190.


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