IJE TRANSACTIONS C: Aspects Vol. 28, No. 12 (December 2015) 1790-1795   

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F. Wei, L. Wenzhuang and Z. Dunwen
( Received: August 07, 2015 – Accepted: December 24, 2015 )

Abstract    Two types of micron-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition(HFCVD) method. Morphology and orientation of crystalline growth were evaluated by SEM and XRD. Diamond film coated tools and sapphire wafer’ surface before and after lapping experiment were contrasted. The results indicated that a significant change in Raman spectrum of two types of micron-diamond film appeared after lapping. The two types of micron- diamond film’s graphitization were all obviously. The SMDF tool’s value of friction coefficient was larger than the FMDF’s. The surface roughness of sapphire wafer lapped by FMDF was lower than by SMDF. Compared two kinds of micron diamond film, FMCD's lapping effect was better.


Keywords    micron-diamond film , lapping, sapphire wafer


چکیده    دو نوع فیلم میکرون-الماس بر روی سوبسترای YG6 با روش رسوب شیمیایی بخار رشته داغ (HFCVD) ساخته شد. مورفولوژی و جهت رشد کریستالی توسط میکروسکوپ الکترونی روبشی (SEM) و پراش اشعه (XRD) X مورد بررسی قرار گرفت. سطح الماس ابزارهای روکش دار شده با الماس و ویفر یاقوت قبل و بعد از تا خوردگی مقایسه شدند. طیف رامان از دو فیلم میکرون-الماس نشان داد که تغییر قابل توجهی در خواص سطحی پس از تا خوردن رخ داده است. این تغییر به گرافیتی شدن سطح الماس مربوط می شود. ضریب اصطکاک ZMDF بزرگتر از ابزار FMDFبود. زبری سطح ویفر یاقوت تا خورده توسط FMDF (بافت <110> )کمتر از (<111>) ZMDF بود. با مقایسه دو نوع فیلم الماس-میکرون معلوم شد که اثر تا خوردگی ابزار FMCD بهتر بود.



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