TY - JOUR ID - 72743 TI - Couple Stress Effect on Micro/Nanocantilever-based Capacitive Gas Sensor JO - International Journal of Engineering JA - IJE LA - en SN - 1025-2495 AU - Safavi, Seyed Mohsen AU - rezazadeh, Ghader AU - Fathalilou, Mohammad AU - Abazari, Amir Musa AD - Mechanical Engineering, Isfahan University of technology AD - mechanical engineering, Urmia university AD - Mechanical Engineering, Urmia University Y1 - 2016 PY - 2016 VL - 29 IS - 6 SP - 852 EP - 861 KW - Chemical sensors KW - MEMS KW - Micro/nanocantilever KW - Couple Stress KW - Resonance shifting DO - N2 - Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever beams for sensing gaseous molecules. Micro/nanocantilever-based gas sensing is concerned with determining the micro/nanocantilever resonance shift or detecting the micro/nanocantilever deflection due to adsorption event. This paper has considered the former approach, i.e., determining the resonance shift. In order to explain these changes more clearly, a micro/nanobeam has to be modeled by considering some micro/nano scale parameters. A modeling based on classic elasticity theory potentially is unable to consider micro/nano scale parameters which have considerable effects on the behavior of the micro/nanobeams. The effect of couple stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. So in this paper, a modeling based on couple stress theory has been applied to explore the behavior of a micro/nanobeam due to the adsorption of gaseous molecules. This work has attempted to advance the field of micro/nanocantilever based gas sensing by shedding more light on the mechanical behavior of micro/nanocantilever. UR - https://www.ije.ir/article_72743.html L1 - https://www.ije.ir/article_72743_9af54edaaee19d63e36c8b8a65200d26.pdf ER -