TY - JOUR ID - 72429 TI - Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE) JO - International Journal of Engineering JA - IJE LA - en SN - 1025-2495 AU - taybi, mehdi AU - azizollah Ganji, bahram AD - Electerical Engineering, Markazi province.Unit.ACECR AD - Electrical Engineering, Babol University of Technology Y1 - 2014 PY - 2014 VL - 27 IS - 12 SP - 1850 EP - 1854 KW - resonance frequency KW - corrugated diaphragm KW - mechanical sensitivity KW - Residual Stress DO - N2 - In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh's method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate the effect of residual stress, Young modulus and corrugation numbers on resonance frequency of diaphragm. In this work, MATLAB software for analytical analyzes and Intellisuite MEMS tool for finite element simulation have been used. The analytical and simulated results have been compared together and there is good agreement between them. UR - https://www.ije.ir/article_72429.html L1 - https://www.ije.ir/article_72429_48600a9b594d57800ff3f9c96860161b.pdf ER -