TY - JOUR ID - 72360 TI - Effect of Temperature and Gas Flux on the Mechanical Behavior of TiC Coating by Pulsed DC Plasma Enhanced Chemical Vapor Deposition(TECHNICAL NOTE) JO - International Journal of Engineering JA - IJE LA - en SN - 1025-2495 AU - Azadi, Mahboobeh AD - Material Eng., Semnan University, Faculty of Material and metallurgical engineering Y1 - 2014 PY - 2014 VL - 27 IS - 8 SP - 1243 EP - 1250 KW - TiC KW - PACVD KW - Temperature KW - Wear DO - N2 -   There are many factors such as voltages, duty cycle, pressure, temperatures and gas flux in coatings process that were effective in changing coatings characteristic. In this paper in plasma enhanced chemical vapor deposition (PECVD) technique, temperature and gas flux are two important variants that affecting the coatings structure and mechanical properties. All TiC coating deposited on a hot work tool steel (H13) had a thickness of 2-3 micrometer. The investigation of TiC coatings composition and structure were done with the grazing incidence XRD, the FTIR (Fourier Transformation Infrared Spectroscopy) and the Field Emission Scanning Electron Microscopy (FE-SEM). The mechanical properties of the coatings, such as hardness, wear resistance and surface roughness were studied with Vickers hardness indentation; pin on disk wear tests and atomic force microscopy, respectively. The best mechanical properties such as a high hardness (3100 VHN), wear resistance and fracture toughness (11.3MPa. m1/2) and low surface roughness (18 nm) were related to the coating that was deposited in 450°C.   UR - https://www.ije.ir/article_72360.html L1 - https://www.ije.ir/article_72360_0e9a3190b5c36f75421c4583622bcc60.pdf ER -