TY - JOUR ID - 103381 TI - Generating and Focusing the Ultrasound Waves Using Elastomer-based Capacitive Micro-Speakers JO - International Journal of Engineering JA - IJE LA - en SN - 1025-2495 AU - Soosani, M. AU - Fathalilou, M. AU - Rezazadeh, G. AU - Homaei, M. AD - Mechanical Engineering Department, Urmia University, Urmia, Iran AD - Mechanical Engineering Department, Urmia University, Urmia, Iran AD - Institute of Engineering and Technology, South Ural State University, Chelyabinsk, Russian Federation Y1 - 2020 PY - 2020 VL - 33 IS - 2 SP - 320 EP - 328 KW - Ultrasound KW - Micro-speaker KW - MEMS KW - Dielectric Elastomers KW - Bessel Panel KW - Focused Pressure Pattern DO - 10.5829/ije.2020.33.02b.17 N2 - Ultrasound wave is a kind of waves with the frequency higher than the human audible frequency. Although ultrasound was first used for military identification purposes, it has been used for decades for various other applications, especially medical applications. Medical applications of ultrasound include diagnostic and therapeutic applications, such as for the treatment of cancer. In this paper, for the first time, electrostatically-actuated micro-speakers made of a dielectric elastomer (DE) have been used to generate and focus the ultrasonic waves using Micro-Electro-Mechanical Systems (MEMS) technology. The results have shown that a single micro-speaker could not generate an efficient focused wave, so an array of the micro-speakers has been considered. The layout of the micro-speakers is a square array of Bessel Panel. It has been shown that by adopting a suitable excitation frequency as well as number of the elements in the Bessel’s panel, the DE-based capacitive micro-structures can focus the generated sound wave in a pre-determined area. UR - https://www.ije.ir/article_103381.html L1 - https://www.ije.ir/article_103381_b812454cb541d33d03b423ad2b2450f2.pdf ER -