%0 Journal Article %T Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation %J International Journal of Engineering %I Materials and Energy Research Center %Z 1025-2495 %A Salarieh, H. %A shabani, rasoul %A Karami, Farzad %D 2014 %\ 09/01/2014 %V 27 %N 9 %P 1439-1448 %! Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation %K Micro %K cantilever %K Electrostatic actuation %K state estimation %K tracking control %K shape control %R %X In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended Kalman filter (EKF) algorithm. A tracking control system is designed to make a specific point of the beam follow a reference signal. The effect of mode selection to include in model on controller performance is also investigated. Based on the tracking controller a shape control algorithm is designed to form the shape of beam into a desired shape. The proposed algorithms are validated by numerical simulation and resulted in a promising performance. %U https://www.ije.ir/article_72382_d163dcdc63d8c6941254c9ead36c59b2.pdf